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13 June 2005 Micro-optics metrology using advanced interferometry
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Interferometric testing of micro-optical components involves some challenges due to problems such as Fresnel diffraction artefacts, the non-common path interferometer configuration, coherent noise as well disturbing interferences, and uncertainties in distance measurements. Recently we have developed a versatile Mach-Zehnder / Twyman-Green hybride interferometer for micro-optics testing. The system combines the advantages of both interferometer types and allows full characterization of lens and surface figure errors as well as radius of curvature and focal length measurements. The interferometer system is explained and measurement results of micro-lenses are presented. Furthermore, this paper is concerned with the metrology challenges of interferometric testing on microscopic scales.
© (2005) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Stephan Reichelt, Alexander Bieber, Bernd Aatz, and Hans Zappe "Micro-optics metrology using advanced interferometry", Proc. SPIE 5856, Optical Measurement Systems for Industrial Inspection IV, (13 June 2005);

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