Absolute distance measurement using femtosecond laser

Seung-Woo Kim; Ki-Nam Joo; Jonghan Jin; Yun Seok Kim

doi:10.1117/12.612238

26 August 2005 Absolute distance measurement using femtosecond laser

Seung-Woo Kim, Ki-Nam Joo, Jonghan Jin, Yun Seok Kim

Proceedings Volume 5858, Nano- and Micro-Metrology; 58580N (2005) https://doi.org/10.1117/12.612238
Event: Optical Metrology, 2005, Munich, Germany

Abstract

Possibilities of using recently-developed femtosecond pulse lasers for advanced precision length metrology are investigated. Special emphasis is placed on the use of femtosecond lasers particularly for absolute distance measurements with sub-micrometer accuracy over extensive ranges. This investigation reveals that femtosecond lasers are capable of providing a suitable means of nanometrology by implementing dispersive comb interferometry in combination with synthetic wavelength interferometry and heterodyne interferometry.

Citation Download Citation

Seung-Woo Kim, Ki-Nam Joo, Jonghan Jin, and Yun Seok Kim "Absolute distance measurement using femtosecond laser", Proc. SPIE 5858, Nano- and Micro-Metrology, 58580N (26 August 2005); https://doi.org/10.1117/12.612238

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