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23 August 2005 Prepolishing and finishing of optical surfaces using fluid jet polishing
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The footprint of the Fluid Jet Polishing process is determined by the shape of the nozzle as well as by the orientation of the slurry beam with respect to the local surface normal. Besides, no tool wear occurs and the footprint remains constant during the manufacturing process allowing shape corrections in a deterministic way. To that aim, FJP has been implemented on a CNC machine and applied for both shaping of previously polished aspheres and polishing of fine ground a-spheres. In this paper, results will be presented showing the application of FJP as a sub-aperture shape correction method. Besides, experimental data will be reported demonstrating FJP's capability of polishing previously fine ground surfaces. The wear rate depends on the sharpness of the abrasives and their kinetic energy. It can thus be adjusted by various parameters, among others the applied pressure, slurry concentration and abrasive sizes. In this paper, an additional process parameter is identified allowing the application of the same polishing compound for wear rates ranging from nanometers to micrometers. This large wear range is achieved by mixing a well controlled amount of gas into the slurry flow allowing the abrasives to travel at higher speeds.
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Wilhelmus A. C. M. Messelink, Reto Waeger, Torsten Wons, Mark Meeder, Kurt C. Heiniger, and Oliver W. Faehnle "Prepolishing and finishing of optical surfaces using fluid jet polishing", Proc. SPIE 5869, Optical Manufacturing and Testing VI, 586908 (23 August 2005);

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