Effects of ion assist and substrate temperature on the optical properties and microstructure of MgF2 films produced by e-beam evaporation

Cheng-Chung Jaing; Ming-Hua Shiao; Cheng-Chung Lee; Chih-Jung Lu; Ming-Chung Liu; Chin-Han Lee; His-Chao Chen

doi:10.1117/12.614753

19 August 2005 Effects of ion assist and substrate temperature on the optical properties and microstructure of MgF₂ films produced by e-beam evaporation

Cheng-Chung Jaing, Ming-Hua Shiao, Cheng-Chung Lee, Chih-Jung Lu, Ming-Chung Liu, Chin-Han Lee, His-Chao Chen

Author Affiliations +

Proceedings Volume 5870, Advances in Thin-Film Coatings for Optical Applications II; 58700F (2005) https://doi.org/10.1117/12.614753
Event: Optics and Photonics 2005, 2005, San Diego, California, United States

Abstract

Magnesium fluoride thin films were prepared by electron-beam evaporation and ion-assisted deposition. The effects of ion assist and substrate temperature during the deposition on the optical properties and microstructure have been studied. The grain size, the crystallinity and the surface roughness of MgF₂ films prepared without IAD all decreased with the decrease of substrate temperature. The MgF₂ films deposited with IAD had small grain size, rough surfaces, fluorine deficiency and large optical loss over the 200-500nm wavelength region due to argon-ion bombardment.

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Cheng-Chung Jaing, Ming-Hua Shiao, Cheng-Chung Lee, Chih-Jung Lu, Ming-Chung Liu, Chin-Han Lee, and His-Chao Chen "Effects of ion assist and substrate temperature on the optical properties and microstructure of MgF₂ films produced by e-beam evaporation", Proc. SPIE 5870, Advances in Thin-Film Coatings for Optical Applications II, 58700F (19 August 2005); https://doi.org/10.1117/12.614753

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