Translator Disclaimer
Paper
19 August 2005 Effects of ion assist and substrate temperature on the optical properties and microstructure of MgF2 films produced by e-beam evaporation
Author Affiliations +
Abstract
Magnesium fluoride thin films were prepared by electron-beam evaporation and ion-assisted deposition. The effects of ion assist and substrate temperature during the deposition on the optical properties and microstructure have been studied. The grain size, the crystallinity and the surface roughness of MgF2 films prepared without IAD all decreased with the decrease of substrate temperature. The MgF2 films deposited with IAD had small grain size, rough surfaces, fluorine deficiency and large optical loss over the 200-500nm wavelength region due to argon-ion bombardment.
© (2005) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Cheng-Chung Jaing, Ming-Hua Shiao, Cheng-Chung Lee, Chih-Jung Lu, Ming-Chung Liu, Chin-Han Lee, and His-Chao Chen "Effects of ion assist and substrate temperature on the optical properties and microstructure of MgF2 films produced by e-beam evaporation", Proc. SPIE 5870, Advances in Thin-Film Coatings for Optical Applications II, 58700F (19 August 2005); https://doi.org/10.1117/12.614753
PROCEEDINGS
6 PAGES


SHARE
Advertisement
Advertisement
RELATED CONTENT

F-type centers in LiBaF3 crystals
Proceedings of SPIE (August 08 2003)
Metal fluoride coatings prepared by ion-assisted deposition
Proceedings of SPIE (September 25 2008)
Structure evolution of stratified NdF3 optical thin films
Proceedings of SPIE (October 01 1997)

Back to Top