Angular and spectroscopic ellipsometry of ion bombarded surface layer

L. V. Poperenko; P. B. Kosel; M. V. Vinnichenko

doi:10.1117/12.615683

25 August 2005 Angular and spectroscopic ellipsometry of ion bombarded surface layer

L. V. Poperenko, P. B. Kosel, M. V. Vinnichenko

Proceedings Volume 5870, Advances in Thin-Film Coatings for Optical Applications II; 58700K (2005) https://doi.org/10.1117/12.615683
Event: Optics and Photonics 2005, 2005, San Diego, California, United States

Abstract

The results were analyzed and systematized and approaches were elaborated to nondestructive monitoring of the surface ion modification. The damage profiles were simulated for metals (Cu, Al, Mo, stainless steel) being irradiated by different ions (H⁺/D⁺, Ar⁺, metal ions) within wide energy range (E=1 keV - 1 MeV). Optical properties of mono-, polycrystalline and amorphous materials were studied by means of angular (wavelength λ=632.8 nm) and spectral ellipsometry (probing photons energy range 0.05-5 eV). The surface of metals were also probed by Auger electron spectroscopy, scanning electron microscopy and atomic force microscopy. As a result of IR ellipsometric studies it has been revealed that treatment of the polycrystalline Ti surface by the mixed Ti⁺ and C⁺ ion beam caused much stronger changes of its subsurface optical properties that treatment of polycrystalline Mo by the same ion beam, because the bombarding ions (Ti⁺) have an affinity with Ti surface atoms. The treatment resulted in formation on Ti surface disordered layer with non-Drude-like behavior of the optical properties. Irradiation of Mo surface by the same ion beam induced the changes of free electron scattering mechanism while optical conductivity remains Drude-like.

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L. V. Poperenko, P. B. Kosel, and M. V. Vinnichenko "Angular and spectroscopic ellipsometry of ion bombarded surface layer", Proc. SPIE 5870, Advances in Thin-Film Coatings for Optical Applications II, 58700K (25 August 2005); https://doi.org/10.1117/12.615683

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KEYWORDS

Ions

Copper

Mirrors

Argon

Aluminum

Plasma

Molybdenum

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