A nanoimprinted polymer lab-on-a-chip with integrated optics

M. Hansen; D. Nilsson; D. M. Johansen; S. Balslev; A. Kristensen

doi:10.1117/12.615997

23 August 2005 A nanoimprinted polymer lab-on-a-chip with integrated optics

M. Hansen, D. Nilsson, D. M. Johansen, S. Balslev, A. Kristensen

Proceedings Volume 5872, Advancements in Polymer Optics Design, Fabrication, and Materials; 58720A (2005) https://doi.org/10.1117/12.615997
Event: Optics and Photonics 2005, 2005, San Diego, California, United States

Abstract

We present a polymer lab-on-a-chip (LOC) microsystem with integrated optics, fabricated by thermal nanoimprint lithography (NIL) in a cyclic olefin copolymer, Topas from Ticona. The LOC contains microfluidic channels and mixers, an absorbance cell, optical waveguides, a microfluidic dye laser, and Fresnel lenses to couple light in and out of the waveguides. The polymer structure is embedded between two glass substrates. By this device we exploit the excellent chemical, mechanical and optical properties of Topas, and demonstrate the fabrication of millimeter to micrometer sized structures in one lithographic step. In addition, the NIL approach allows for addition of nanometer-scale features, limited only by the stamp fabrication. The silicon stamp for the imprint process is fabricated by standard UV-lithography and silicon deep reactive ion etching (DRIE). The sidewall roughness of the DRIE process is reduced to below 15 nm by thermal oxidation and subsequent oxide etching. Prior to imprint the stamp is coated with an anti-sticking coating from a perfluorodecyltrichlorosilane precursor by molecular vapor deposition. Topas, in our case grade 8007, dissolved in toluene is spin coated onto a SiO₂ substrate. The imprint temperature is 200 °C, at an imprint force of 15000 N on a 4 inch wafer, imprint time is 5 min. Finally the imprinted structure is bonded to a pyrex wafer with a second layer of Topas in our case grade 9506. Bonding temperature is 70 °C, at a bonding force of 5000 N on a 4 inch wafer. Bonding time is 5 min.

Citation Download Citation

M. Hansen, D. Nilsson, D. M. Johansen, S. Balslev, and A. Kristensen "A nanoimprinted polymer lab-on-a-chip with integrated optics", Proc. SPIE 5872, Advancements in Polymer Optics Design, Fabrication, and Materials, 58720A (23 August 2005); https://doi.org/10.1117/12.615997

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