A novel method for fabrication of continuous relief optical element

Xiaowei Guo; Jinglei Du; Mingyong Chen; Yanqin Ma; Jianhua Zhu; Qinjun Peng; Yongkang Guo; Chunlei Du

doi:10.1117/12.619598

26 August 2005 A novel method for fabrication of continuous-relief optical elements

Xiaowei Guo, Jinglei Du, Mingyong Chen, Yanqin Ma, Jianhua Zhu, Qinjun Peng, Yongkang Guo, Chunlei Du

Proceedings Volume 5874, Current Developments in Lens Design and Optical Engineering VI; 58740S (2005) https://doi.org/10.1117/12.619598
Event: Optics and Photonics 2005, 2005, San Diego, California, United States

Abstract

A novel method for the fabrication of continuous micro-optical components is presented in this paper. It employs a computer controlled spatial-light-modulator (SLM) as a switchable projection mask and silver-halide sensitized gelatin (SHSG) as recording material. By etching SHSG with enzyme solution, the micro-optical components with relief modulation can be generated through special processing procedures. The principles of digital SLM-based lithography and enzyme etching SHSG are discussed in detail, and microlens arrays, micro axicon-lens arrays and gratings with good profile were achieved. This method is simple, cheap and the aberration in processing procedures can be in-situ corrected in the step of designing mask, so it is a practical method to fabricate continuous profile for low-volume production.

Citation Download Citation

Xiaowei Guo, Jinglei Du, Mingyong Chen, Yanqin Ma, Jianhua Zhu, Qinjun Peng, Yongkang Guo, and Chunlei Du "A novel method for fabrication of continuous-relief optical elements", Proc. SPIE 5874, Current Developments in Lens Design and Optical Engineering VI, 58740S (26 August 2005); https://doi.org/10.1117/12.619598

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