Paper
30 August 2005 Actual performance vs. modeled performance of diffractive beam splitters
Todd Lizotte, Richard Rosenberg, Orest Ohar
Author Affiliations +
Abstract
Performance of diffractive optics is influenced partly by fabrication; however the design and modeling of the diffractive optics prior to fabrication play a significant role in the ultimate performance results. When designing completely new diffractive optics, the tendency is to design, model, fabricate and then hope for the best. Many companies who look to source diffractive optics come face to face with the reality of this dilemma since diffractive optic suppliers tend to provide their services on a "best effort basis". In short this means, if the vendor does not get it right the first time, the client will need to place a second order. At which point the diffractive optic vendor will try to make it better the second time around, but no guarantee. This paper will examine and compare the design methods used to generate diffractive optical structures and performance models as well as the micro machining processes used for the fabrication of a diffractive fan out or splitter element. Examples of computer software for design and modeling will be described showing how various approximation and encoding methods compare. An overview of the optical testing methods used will be discussed including the specific test equipment and metrology techniques used to verify performance and dimensional stability. The paper will demonstrate a real world application by showing the analysis of a series (same design) of a one dimensional splitters with varying etch depths and geometries. Presentation of data will include fabrication dimensional errors, splitter beam uniformity and beam efficiency as compared to the original intended design performance and models. Finally a summary of helpful guidelines will be outlined for engineers seeking to develop prototype diffractive optics.
© (2005) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Todd Lizotte, Richard Rosenberg, and Orest Ohar "Actual performance vs. modeled performance of diffractive beam splitters", Proc. SPIE 5876, Laser Beam Shaping VI, 58760I (30 August 2005); https://doi.org/10.1117/12.618549
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CITATIONS
Cited by 2 scholarly publications.
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KEYWORDS
Beam splitters

Etching

Binary data

Performance modeling

Data modeling

Photomasks

Optical components

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