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18 August 2005 A DSP-based controller for a linear actuator system with sub-angstrom resolution and 15-millimeter travel range
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Proceedings Volume 5877, Optomechanics 2005; 58770G (2005) https://doi.org/10.1117/12.617855
Event: Optics and Photonics 2005, 2005, San Diego, California, United States
Abstract
We have designed and tested a new digital signal processor (DSP)-based closed-loop feedback controller for a linear actuator system with sub-angstrom resolution and 15-mm travel range. The linear actuator system consists of a laser Doppler encoder with multiple-reflection optics [1], a high-stiffness weak-link mechanism with high driving sensitivity and stability [2], and a Texas Instruments TMS320C40 DSP-based controller for high-performance closed-loop feedback control. In this paper, we discuss the DSP-based controller design, as well as recent test results yielding step sizes below 50 picometers obtained with the atomic force microprobe setup.
© (2005) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Alex Smolyanitskiy, Deming Shu, and Thomas Wong "A DSP-based controller for a linear actuator system with sub-angstrom resolution and 15-millimeter travel range", Proc. SPIE 5877, Optomechanics 2005, 58770G (18 August 2005); https://doi.org/10.1117/12.617855
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