Light scatter metrology of diamond turned optics

John C. Stover

doi:10.1117/12.613779

31 August 2005 Light scatter metrology of diamond turned optics

John C. Stover

Proceedings Volume 5878, Advanced Characterization Techniques for Optics, Semiconductors, and Nanotechnologies II; 58780R (2005) https://doi.org/10.1117/12.613779
Event: Optics and Photonics 2005, 2005, San Diego, California, United States

Abstract

Light scatter, a bothersome source of noise in optical system, can also be used as a sensitive indicator of surface features. Diamond turned optics typically have three types of surface features. In addition to the background near isotropic (two dimensional) roughness found on most polished front surface mirrors, there are two sources of one dimensional roughness. One of these is the expected periodic tool mark structure that can create a diffraction pattern. The other is random one dimensional roughness (parallel to the tool marks) that is caused by chip drag and jitter between tool and sample. This paper discusses experimental methods for separating the effects of these three distinct sources of roughness and gives examples of measurements on several samples. Several sources of confusion associated with rms roughness specifications (which are often substituted for scatter specifications) are also discussed.

Citation Download Citation

John C. Stover "Light scatter metrology of diamond turned optics", Proc. SPIE 5878, Advanced Characterization Techniques for Optics, Semiconductors, and Nanotechnologies II, 58780R (31 August 2005); https://doi.org/10.1117/12.613779

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