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18 August 2005 Rough surface characterization and comparison of scatter measurements and models
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Abstract
A study has been underway to provide a better scattering model for front surface reflectors with surface height variations that violate the smooth surface limit required for using the Rayleigh-Rice vector perturbation expression. This paper discusses the issues associated with surface characterization and sample measurement. These include the conversion of 1-D profile measurements to the 1-D PSD, the high frequency correction for the PSD and conversion to the 2-D PSD for use in a scattering model. A single comparison to a new rough surface scattering model is presented. The details of the model are not given in this paper.
© (2005) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
John C. Stover "Rough surface characterization and comparison of scatter measurements and models", Proc. SPIE 5878, Advanced Characterization Techniques for Optics, Semiconductors, and Nanotechnologies II, 58780U (18 August 2005); https://doi.org/10.1117/12.613780
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