Characteristics of SiC/Mg multilayer mirrors

Tetsunori Murachi; Ichiro Yoshikawa D.D.S.; Hisataka Takenaka; Satoshi Ichimaru

doi:10.1117/12.616538

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6 October 2005 Characteristics of SiC/Mg multilayer mirrors

Tetsunori Murachi, Ichiro Yoshikawa D.D.S., Hisataka Takenaka, Satoshi Ichimaru

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Proceedings Volume 5900, Optics for EUV, X-Ray, and Gamma-Ray Astronomy II; 59001A (2005) https://doi.org/10.1117/12.616538
Event: Optics and Photonics 2005, 2005, San Diego, California, United States

Abstract

A multilayer coating mirror of Mo/Si is usually integrated into an EUV optics for space science, especially for He-II (30.4 nm) radiation, because it is highly stable under vacuum and atmosphere and achieves the fairly high reflectance of 15-20%. But space science community needs the coating of higher reflectance at 30.4 nm radiation for the future satellite missions. In this work, to develop a new multilayer mirror of He-II radiation, we report the design of a multilayer consisting of a pair of Mg and SiC, and its production, and aging change of the reflectance under the atmosphere and vacuum circumstance.

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Tetsunori Murachi, Ichiro Yoshikawa D.D.S., Hisataka Takenaka, and Satoshi Ichimaru "Characteristics of SiC/Mg multilayer mirrors", Proc. SPIE 5900, Optics for EUV, X-Ray, and Gamma-Ray Astronomy II, 59001A (6 October 2005); https://doi.org/10.1117/12.616538

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