Hard x-ray nano-focusing at 40nm level using K-B mirror optics for nanoscopy/spectroscopy

Satoshi Matsuyama; Hidekazu Mimura; Hirokatsu Yumoto; Hideyuki Hara; Kazuya Yamamura; Yasuhisa Sano; Katsuyoshi Endo; Yuzo Mori; Yoshinori Nishino; Kenji Tamasaku; Makina Yabashi; Tetsuya Ishikawa; Kazuto Yamauchi

doi:10.1117/12.623035

31 August 2005 Hard x-ray nano-focusing at 40nm level using K-B mirror optics for nanoscopy/spectroscopy

Satoshi Matsuyama, Hidekazu Mimura, Hirokatsu Yumoto, Hideyuki Hara, Kazuya Yamamura, Yasuhisa Sano, Katsuyoshi Endo, Yuzo Mori, Yoshinori Nishino, Kenji Tamasaku, Makina Yabashi, Tetsuya Ishikawa, Kazuto Yamauchi

Author Affiliations +

Proceedings Volume 5918, Laser-Generated, Synchrotron, and Other Laboratory X-Ray and EUV Sources, Optics, and Applications II; 591804 (2005) https://doi.org/10.1117/12.623035
Event: Optics and Photonics 2005, 2005, San Diego, California, United States

Abstract

X-ray focusing techniques using Kirkpatrick and Baez mirrors are promising due to their capability of highly efficient and energy-tunable focusing. We have been developing a hard-X-ray focusing system using K-B mirrors for an X-ray microscope. Here, we report the development of a mirror manipulator and focusing tests using the manipulator. Mirror alignment tolerances were estimated using two types of simulators: a ray-trace simulator and a wave-optical simulator. On the basis of the simulation results, the mirror manipulator was developed achieving optimum K-B mirrors setup. The focal size was achieved to be 48 x 36nm² (V x H) in FWHM at 1km long beamline of SPring-8. The obtained spatial resolution test results indicate that a scanning microscope with the focused beam can resolve the line-and-space patterns of 80nm line width in a high visibility of 60%.

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Satoshi Matsuyama, Hidekazu Mimura, Hirokatsu Yumoto, Hideyuki Hara, Kazuya Yamamura, Yasuhisa Sano, Katsuyoshi Endo, Yuzo Mori, Yoshinori Nishino, Kenji Tamasaku, Makina Yabashi, Tetsuya Ishikawa, and Kazuto Yamauchi "Hard x-ray nano-focusing at 40nm level using K-B mirror optics for nanoscopy/spectroscopy", Proc. SPIE 5918, Laser-Generated, Synchrotron, and Other Laboratory X-Ray and EUV Sources, Optics, and Applications II, 591804 (31 August 2005); https://doi.org/10.1117/12.623035

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