Cross-check of different techniques for two-dimensional power spectral density measurements of x-ray optics

Valeriy V. Yashchuk; Steve C. Irick; Eric M. Gullikson; Malcolm R. Howells; Alastair A. MacDowell; Wayne R. McKinney; Farhad Salmassi; Tony Warwick

doi:10.1117/12.619892

16 September 2005 Cross-check of different techniques for two-dimensional power spectral density measurements of x-ray optics

Valeriy V. Yashchuk, Steve C. Irick, Eric M. Gullikson, Malcolm R. Howells, Alastair A. MacDowell, Wayne R. McKinney, Farhad Salmassi, Tony Warwick

Author Affiliations +

Proceedings Volume 5921, Advances in Metrology for X-Ray and EUV Optics; 59210G (2005) https://doi.org/10.1117/12.619892
Event: Optics and Photonics 2005, 2005, San Diego, California, United States

Abstract

The consistency of different instruments and methods for measuring two-dimensional (2D) power spectral density (PSD) distributions are investigated. The instruments are an interferometric microscope, an atomic force microscope (AFM) and the X-ray Reflectivity and Scattering experimental facility, all available at Lawrence Berkeley National Laboratory. The measurements were performed with a gold-coated mirror with a highly polished stainless steel substrate. It was shown that these three techniques provide essentially consistent results. For the stainless steel mirror, an envelope over all measured PSD distributions can be described with an inverse power-law PSD function. It is also shown that the measurements can be corrected for the specific spatial frequency dependent systematic errors of the instruments. The AFM and the X-ray scattering measurements were used to determine the modulation transfer function of the interferometric microscope. The corresponding correction procedure is discussed in detail. Lower frequency investigation of the 2D PSD distribution was also performed with a long trace profiler and a ZYGO GPI interferometer. These measurements are in some contradiction, suggesting that the reliability of the measurements has to be confirmed with additional investigation. Based on the crosscheck of the performance of all used methods, we discuss the ways for improving the 2D PSD characterization of X-ray optics.

Citation Download Citation

Valeriy V. Yashchuk, Steve C. Irick, Eric M. Gullikson, Malcolm R. Howells, Alastair A. MacDowell, Wayne R. McKinney, Farhad Salmassi, and Tony Warwick "Cross-check of different techniques for two-dimensional power spectral density measurements of x-ray optics", Proc. SPIE 5921, Advances in Metrology for X-Ray and EUV Optics, 59210G (16 September 2005); https://doi.org/10.1117/12.619892

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available