Silicon nanocrystals in superlattices of yttrium-stabilized zirconia and silicon

Arjun Guha; M. Alexe; R. Scholz

doi:10.1117/12.609798

22 August 2005 Silicon nanocrystals in superlattices of yttrium-stabilized zirconia and silicon

Arjun Guha, M. Alexe, R. Scholz

Proceedings Volume 5925, Nanophotonic Materials and Systems II; 59250L (2005) https://doi.org/10.1117/12.609798
Event: Optics and Photonics 2005, 2005, San Diego, California, United States

Abstract

Silicon nanocrystals embedded in silicon dioxide matrices have exhibited optical gain in the visible region when pumped by a laser source, but to be commercially viable in laser applications and integration into microelectronics, emission has to be electrically stimulated rather than optically pumped. Superlattices of silicon and different non-silicon oxides were fabricated by pulsed laser deposition and subsequent rapid thermal annealing in inert atmosphere to obtain nanocrystalline silicon embedded in crystalline oxide layers. High resolution transmission electron microscopy was used to detect presence of silicon nanocrystals embedded in a silicon dioxide matrix. Reported in this letter are silicon nanocrystals with size from 3 nm to 7 nm obtained in Si/YSZ superlattices.

Citation Download Citation

Arjun Guha, M. Alexe, and R. Scholz "Silicon nanocrystals in superlattices of yttrium-stabilized zirconia and silicon", Proc. SPIE 5925, Nanophotonic Materials and Systems II, 59250L (22 August 2005); https://doi.org/10.1117/12.609798

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available