Two and three-dimensional photonic crystals of titanium dioxide and optical properties

Koichi Awazu; Xiaomin Wang; Makoto Fujimaki; Hiroaki Imai; Taketo Kuriyama; Yoshimichi Ohki

doi:10.1117/12.617647

26 August 2005 Two and three-dimensional photonic crystals of titanium dioxide and optical properties

Koichi Awazu, Xiaomin Wang, Makoto Fujimaki, Hiroaki Imai, Taketo Kuriyama, Yoshimichi Ohki

Proceedings Volume 5931, Nanoengineering: Fabrication, Properties, Optics, and Devices II; 593106 (2005) https://doi.org/10.1117/12.617647
Event: Optics and Photonics 2005, 2005, San Diego, California, United States

Abstract

Two-dimensional photonic crystals of titanium dioxide are predicted to have many advantages over semiconductor photonic crystals, e.g., silicon and GaAs: in particular, low optical loss in the near infrared region used for optical communication, low thermal expansion, and a refractive index which is close to that of optical fibers. However, it is difficult to create micro-nano structures in titanium dioxide, since semiconductor micro-fabrication techniques cannot be applied to titanium dioxide. As the first step, we calculated the photonic band gap of titanium dioxide rod-slab on SiO₂. Band gap percent against thickness of the rod-slab was also examined. Finally, we confirmed the most suitable structure for 2D photonic crystals. A deep X-ray lithography technique was employed to create a very deep and precise template. Liquid-phase deposition was then used to faithfully deposit a tightly packed layer of titanium oxide onto the template. Finally, the template was selectively removed to obtain a photonic nano-structure. A template for the most appropriate three dimensional structure was also fabricated using the method proposed by Yablonovitch. By employing the same method, we successfully obtained the 3D structure of TiO₂.

Citation Download Citation

Koichi Awazu, Xiaomin Wang, Makoto Fujimaki, Hiroaki Imai, Taketo Kuriyama, and Yoshimichi Ohki "Two and three-dimensional photonic crystals of titanium dioxide and optical properties", Proc. SPIE 5931, Nanoengineering: Fabrication, Properties, Optics, and Devices II, 593106 (26 August 2005); https://doi.org/10.1117/12.617647

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