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27 August 2005 Monolithic low sideband guided-mode resonance filter based on two-layer structure
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Abstract
In this paper, fabrication an optical filter based on guided-mode resonance (GMR) effect in a silicon nitride (SiNx) membrane by silicon bulk micromachining technologies is demonstrated. Such a filter has advantages of simple structure, high efficiency and it is potential to be integrated with other developed optoelectronic elements into an integrated micro systems. The design consideration, fabrication procedures and measured spectral response are shown in this paper.
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Che-Lung Hsu, Yu-Hong Chou, Chih-Ming Wang, Jenq-Yang Chang, and Chien-Chieh Lee "Monolithic low sideband guided-mode resonance filter based on two-layer structure", Proc. SPIE 5931, Nanoengineering: Fabrication, Properties, Optics, and Devices II, 593116 (27 August 2005); https://doi.org/10.1117/12.616749
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