3D interferometric measurement system for machine tool on-line control

V. Micó; M. T. Molina-Jiménez; J. Caballero-Aroca; S. Simón-Martín; E. Pérez-Picazo; A. R. Jiménez; L. Calderón; M. Calvache; F. Seco; R. Bueno

doi:10.1117/12.623755

7 October 2005 3D interferometric measurement system for machine tool on-line control

V. Micó, M. T. Molina-Jiménez, J. Caballero-Aroca, S. Simón-Martín, E. Pérez-Picazo, A. R. Jiménez, L. Calderón, M. Calvache, F. Seco, R. Bueno

Author Affiliations +

Proceedings Volume 5948, Photonics Applications in Industry and Research IV; 59482N (2005) https://doi.org/10.1117/12.623755
Event: Congress on Optics and Optoelectronics, 2005, Warsaw, Poland

Abstract

We present the definition and development of a three dimensional high precision measurement system for localisation and control of machine tool's drill based on a Michelson-Morley interferometric configuration and a laser tracking subsystem to redirect the measurement beam onto a retro-reflector positioned in the tool nearness. The system measures the retro-reflector position in real time with 5 microns accuracy up to 2 m/s processing material velocities and it is used to carry out an on-line control feedback of the drill position in the machine tool allowing a drill tool replacement during the fabrication process. The system has been integrated and tested in an especially designed machine tool built for this application.

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V. Micó, M. T. Molina-Jiménez, J. Caballero-Aroca, S. Simón-Martín, E. Pérez-Picazo, A. R. Jiménez, L. Calderón, M. Calvache, F. Seco, and R. Bueno "3D interferometric measurement system for machine tool on-line control", Proc. SPIE 5948, Photonics Applications in Industry and Research IV, 59482N (7 October 2005); https://doi.org/10.1117/12.623755

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