Multimode interference devices based on silicon

V. J. Cadarso; I. Salinas; A. Llobera; C. Dominguez

doi:10.1117/12.621647

30 September 2005 Multimode interference devices based on silicon

V. J. Cadarso, I. Salinas, A. Llobera, C. Dominguez

Proceedings Volume 5956, Integrated Optics: Theory and Applications; 595611 (2005) https://doi.org/10.1117/12.621647
Event: Congress on Optics and Optoelectronics, 2005, Warsaw, Poland

Abstract

Multimode interference devices based on silicon hollow waveguides have been designed, simulated, fabricated and characterized. Adequate confinement of light into a hollow waveguide and minimization of the propagation losses require a roughness of the structure below the working wavelength. This assures to have mirror behavior at the facets that optimize the Fresnel reflections. In order to achieve this low roughness and a perfectly vertical walls, to obtain a rectangular shape, an optimization of the fabrication process, especially deep reactive ion etching process, has been made. The numerical and experimental anti-symmetrical behavior for symmetrical and anti-symmetrical out waveguides in anti-symmetrical multimode interference devices is in accordance with the theory of multimode interference effects. The excellent behavior and properties of these devices shows the silicon hollow waveguides excellent for the design of integrated optical devices.

Citation Download Citation

V. J. Cadarso, I. Salinas, A. Llobera, and C. Dominguez "Multimode interference devices based on silicon", Proc. SPIE 5956, Integrated Optics: Theory and Applications, 595611 (30 September 2005); https://doi.org/10.1117/12.621647

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available