Recent growth of micro and nano technology offers large variety of micro scale devices, which gradually replace bulk appliances of everyday use. MEMS devices are being used in medical, science research, military and industrial applications. Since their technology is not fully mastered yet, they require special measurement treatment from stage of production to stage of utilization. Most of nowadays used bulk measurement instrumentation require special preparation of MEMS element to test (putting elements on special stages or combining MEMS devices with cheap and simple instrumentation (fiber sensors)). Since MEMS technology is meant to be inexpensive a trend of building MEMS measurement instrumentation for nano and micro elements testing appeared. In this paper we present the concept of novel multifunctional waveguide interferometer for three components of displacement vector measurement of elements with optical or rough surfaces. The measurement system combines the various techniques: conventional Twyman-Green (TGI), grating (moire)
interferometry (GI), ESPI and digital holographic interferometry (DHI). It consists of several modules such as light source and detector integrated module, passive interferometric module, waveguide interferometer head and MEMS based active beam manipulators. The proposed design of modules decrease significantly their sensitivity to vibration, so that they can work in instable environment.