Spatial and temporal development of discharge instabilities in fluorine based excimer laser gas mixtures

D. Mathew; H. M. J. Bastiaens; K.-J. Boller; P. J. M. Peters

doi:10.1117/12.622900

11 October 2005 Spatial and temporal development of discharge instabilities in fluorine based excimer laser gas mixtures

D. Mathew, H. M. J. Bastiaens, K.-J. Boller, P. J. M. Peters

Author Affiliations +

Proceedings Volume 5958, Lasers and Applications; 59581A (2005) https://doi.org/10.1117/12.622900
Event: Congress on Optics and Optoelectronics, 2005, Warsaw, Poland

Abstract

The influence of the buffer gases on the discharge homogeneity of F₂doped excimer laser gas mixtures is investigated in a small x-ray preionised high-pressure discharge chamber. The spatial and temporal development of discharges in He/F₂ and Ne/F₂ gas mixtures is monitored via its fluorescence using an intensified CCD camera with a gating time of 300 ps. The formation and development of discharge filaments in He/F₂ gas mixtures is completely different from that in Ne/F₂. Under the same start up conditions, discharges in Ne/F₂ are dominated by cathode hotspots where as no hot spots are visible in discharges in He/F₂ gas mixtures. However, the discharges in Ne/F₂ gas mixtures appear to be more uniform even though the discharge width decreases in time and hotspots are persistent on the cathode surface.

Citation Download Citation

D. Mathew, H. M. J. Bastiaens, K.-J. Boller, and P. J. M. Peters "Spatial and temporal development of discharge instabilities in fluorine based excimer laser gas mixtures", Proc. SPIE 5958, Lasers and Applications, 59581A (11 October 2005); https://doi.org/10.1117/12.622900

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