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14 October 2005 Improved grating microspectrometer
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The aim of the presented LIGA-microspectrometer design is, to improve the spectral resolution and to achieve a high sensitivity covering at the same time a large spectral range. The footprint of the microspectrometer had to be increased to achieve these goals. To limit the increasing of the size of the system, the internal optical path was folded by introducing a mirror. The spectrometer is a grating spectrometer where the light is guided in a hollow waveguide. To improve the sensitivity of the spectrometer, the losses in the hollow waveguide had to be limited. As these losses increase with the number of reflections in the waveguide, a collimator lens in front of the entrance slit was introduced to realize a quasi free space propagation of the light in the waveguide. The concept of this microspectrometer, its characteristics, dimensions and key elements, such as entrance slit, collimator lens, hollow waveguide, optical path folding and decoupling mirror, are explained. Also the result of the photographic characterization of the microspectrometer is shown.
© (2005) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
C. J. Moran-Iglesias, A. Last, and J. Mohr "Improved grating microspectrometer", Proc. SPIE 5962, Optical Design and Engineering II, 596225 (14 October 2005);


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