Paper
4 October 2005 Manufacturing of linear variable filters with straight iso-thickness lines
Laetitia Abel-Tiberini, Frédéric Lemarquis, Gérard Marchand, Luc Roussel, Gérard Albrand, Michel Lequime
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Abstract
Linear variables filters are band-pass multilayer coatings manufactured with a thickness gradient that allows a significant wavelength shift of the centring wavelength of the filter according to the point that is illuminated. In case such a filter is associated with a 2D matrix detector in order to form a compact spectrometer, iso-thickness lines must be as straight as possible, perpendicularly to the thickness gradient. To answer this problem, we developed a masking mechanism that combine the classical rotation movement of substrates and a translation movement for the mask, this last movement being induced during the rotation by the mean of a cam. Thickness gradient can be freely adjusted according to specifications, while transverse uniformity is 99.9%.
© (2005) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Laetitia Abel-Tiberini, Frédéric Lemarquis, Gérard Marchand, Luc Roussel, Gérard Albrand, and Michel Lequime "Manufacturing of linear variable filters with straight iso-thickness lines", Proc. SPIE 5963, Advances in Optical Thin Films II, 59630B (4 October 2005); https://doi.org/10.1117/12.624779
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Cited by 6 scholarly publications.
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KEYWORDS
Linear filtering

Content addressable memory

Manufacturing

Sputter deposition

Optical properties

Optical coatings

Optical filters

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