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4 October 2005 Real-time lateral optical monitoring for the production of complex multilayer stacks
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We present a direct optical monitoring system that allows to minimize in-situ shift of parameters during process. In particular, we show how real-time optical monitoring on one or several lateral samples located on the same circumference of final components overcomes the problem of uniformity time dependence for long process and allows the fabrication of complex optical functions. Real-time signal processing on transmittance versus wavelength is used to determine in-situ refractive index of deposited material for each layer in the multilayer stack. It is shown how this method can be applied to the realization of quarter-wave and non quarter-wave stacks and the repeatability of a fully automated process is demonstrated for different components such as narrow band filters, polarizers or edge filters. Numerous experimental results from different deposition techniques are presented.
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Catherine Grèzes-Besset, Didier Torricini, and Frédéric Chazallet "Real-time lateral optical monitoring for the production of complex multilayer stacks", Proc. SPIE 5963, Advances in Optical Thin Films II, 59630E (4 October 2005);

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