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4 October 2005 Innovative production of thin film laser components
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Future production of high quality laser components asks for both, the precise preparation of low loss multilayer stacks and a clean room compatible innovative deposition process. In addition a cost-effective thin film filter production is required in order to transfer new developments like ultra fast pulse laser technique from research to economical products and applications. One of the most promising candidates is magnetron sputtering due to the potential of excellent film properties, a fully automatic clean room compatible manufacturing process and a high productivity. Similar film qualities as with ion beam sputtering are realised but with a more than 10 times higher productivity. The reproducible production of multilayer broad band mirrors with controlled group delay dispersion and low losses is still a big challenge. Promising results were achieved on the basis of silica and niobia and will be presented.
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Michael Scherer, Harro Hagedorn, Walter Lehnert, and Juergen Pistner "Innovative production of thin film laser components", Proc. SPIE 5963, Advances in Optical Thin Films II, 596319 (4 October 2005);

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