Organically modified SiO2 coatings on polycarbonate

Kerstin Lau; Ulrike Schulz; Norbert Kaiser

doi:10.1117/12.621089

4 October 2005 Organically modified SiO₂ coatings on polycarbonate

Kerstin Lau, Ulrike Schulz, Norbert Kaiser

Proceedings Volume 5963, Advances in Optical Thin Films II; 59631C (2005) https://doi.org/10.1117/12.621089
Event: Optical Systems Design 2005, 2005, Jena, Germany

Abstract

Improvements of the environmental stability of inorganic optical coatings on polymer substrates are expected from a slight variation of the chemical composition of SiO₂ films by organic modification through the addition of gaseous hexamethyldisiloxane (HMDSO) to a classical plasma ion-assisted deposition process. The influence of several process parameters on the chemical composition of these coatings has been studied on polycarbonate, quartz glass and silicon substrates to define an optimum range of process parameters with regard to the useful properties obtained of the coated polymer optical component.

Citation Download Citation

Kerstin Lau, Ulrike Schulz, and Norbert Kaiser "Organically modified SiO₂ coatings on polycarbonate", Proc. SPIE 5963, Advances in Optical Thin Films II, 59631C (4 October 2005); https://doi.org/10.1117/12.621089

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