Translator Disclaimer
5 October 2005 Laser ablation of SiOx thin films for direct mask writing
Author Affiliations +
The present study of silica thin films illustrates a new way of direct writing diffractive phase elements by means of UV laser ablation. The concept consists in the conversion of highly absorbing silica layers, which are suitable for laser ablation, into UV transparent structures by thermal annealing, after a direct laser patterning process. This concept has been investigated in detail for several process parameters. As example, a pixel pattern, generated by an appropriate optical design algorithm, is transferred into a phase delay pattern in form of a silica surface relief, which results in a diffractive shaping of a beam transmitted (or reflected) by this structured layer. The direct mask patterning could be achieved at a moderate laser fluence of 350 mJ/cm2 with a 248 nm excimer laser.
© (2005) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
J. Heber, J. Ihlemann, M. Schulz-Ruhtenberg, and J. Schmidt "Laser ablation of SiOx thin films for direct mask writing", Proc. SPIE 5963, Advances in Optical Thin Films II, 596326 (5 October 2005);


High power excimer laser micromachining
Proceedings of SPIE (March 01 2006)
Laser patterning of lead frames for electroplating
Proceedings of SPIE (September 23 1996)
Chromium Mask Damage In Excimer Laser Projection Processing
Proceedings of SPIE (January 01 1988)
Laser ablation patterning of layered systems a method to...
Proceedings of SPIE (January 17 2003)
Laser-induced damage in pellicles at 193 nm
Proceedings of SPIE (June 01 1992)

Back to Top