Uncooled microbolometer detector: recent development at Ulis

J. L. Tissot; C. Trouilleau; A. Crastes; B. Fièque; O. Legras

doi:10.1117/12.626617

14 October 2005 Uncooled microbolometer detector: recent development at Ulis

J. L. Tissot, C. Trouilleau, A. Crastes, B. Fièque, O. Legras

Proceedings Volume 5964, Detectors and Associated Signal Processing II; 59640F (2005) https://doi.org/10.1117/12.626617
Event: Optical Systems Design 2005, 2005, Jena, Germany

Abstract

Uncooled infrared focal plane arrays are being developed for a wide range of thermal imaging applications. Firefighting, predictive maintenance, process control and thermography are a few of the industrial applications which could take benefit from uncooled infrared detector. Therefore, to answer these markets, a 35 μm pixel-pitch uncooled IR detector technology has been developed enabling high performance 160 x 120 and 384 x 288 arrays production. Besides a wide-band version from uncooled 320 x 240 / 45 μm array has been also developed in order to address process control and more precisely industrial furnaces control. The ULIS amorphous silicon technology is well adapted to manufacture low cost detector in mass production. After some brief microbolometer technological background, we present the characterization of 35 μm pixel-pitch detector as well as the wide-band 320 x 240 infrared focal plane arrays with a pixel pitch of 45 μm.

Citation Download Citation

J. L. Tissot, C. Trouilleau, A. Crastes, B. Fièque, and O. Legras "Uncooled microbolometer detector: recent development at Ulis", Proc. SPIE 5964, Detectors and Associated Signal Processing II, 59640F (14 October 2005); https://doi.org/10.1117/12.626617

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