Bessel beam based optical profilometry

V. Belyi; M. Kroening; N. Kazak; N. Khilo; A. Mashchenko; P. Ropot

doi:10.1117/12.624491

15 October 2005 Bessel beam based optical profilometry

V. Belyi, M. Kroening, N. Kazak, N. Khilo, A. Mashchenko, P. Ropot

Proceedings Volume 5964, Detectors and Associated Signal Processing II; 59640L (2005) https://doi.org/10.1117/12.624491
Event: Optical Systems Design 2005, 2005, Jena, Germany

Abstract

We present our results of the development of some schemes for nondestructive optical profilometry of cylindrically shaped surfaces by using spatially matched conical light beams. A theoretical model is elaborated which describes profilometers with Bessel beams. A special feature of the profilometers proposed is the possibility to control their sensitivity and resolution. To this end, a scheme of tuning the cone angle of the Bessel beam over a wide range is incorporated. The operation regime of the profilometers is characterized by a nonzero spatial frequency of output signal. It allow us to apply a new algorithm for the interpretation of the output signal. This algorithm consists in the calculation of the azimuth spectrum which characterizes the deviation of tested profiles from the circular ones.

Citation Download Citation

V. Belyi, M. Kroening, N. Kazak, N. Khilo, A. Mashchenko, and P. Ropot "Bessel beam based optical profilometry", Proc. SPIE 5964, Detectors and Associated Signal Processing II, 59640L (15 October 2005); https://doi.org/10.1117/12.624491

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