Paper
19 October 2005 Characterization of resonance domain diffractive optical elements
Author Affiliations +
Abstract
Experimental and calculated characterization of resonance domain surface relief gratings with different groove shapes, groove depths, and groove slant angles are presented. Our results reveal that Bragg type diffraction, with efficiencies of about 90% can be achieved by properly choosing certain parameters of the resonance domain surface relief gratings.
© (2005) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Michael A. Golub, Leon Eisen, Asher A. Friesem, and Michael Meyklyar "Characterization of resonance domain diffractive optical elements", Proc. SPIE 5965, Optical Fabrication, Testing, and Metrology II, 596506 (19 October 2005); https://doi.org/10.1117/12.625994
Lens.org Logo
CITATIONS
Cited by 1 scholarly publication.
Advertisement
Advertisement
RIGHTS & PERMISSIONS
Get copyright permission  Get copyright permission on Copyright Marketplace
KEYWORDS
Diffraction gratings

Diffraction

Photoresist materials

Scanning electron microscopy

Photography

Silica

Atomic force microscopy

Back to Top