Subaperture metrology technologies extend capabilities in optics manufacturing

Marc Tricard; Greg Forbes; Paul Murphy

doi:10.1117/12.625808

25 October 2005 Subaperture metrology technologies extend capabilities in optics manufacturing

Marc Tricard, Greg Forbes, Paul Murphy

Proceedings Volume 5965, Optical Fabrication, Testing, and Metrology II; 59650B (2005) https://doi.org/10.1117/12.625808
Event: Optical Systems Design 2005, 2005, Jena, Germany

Abstract

Subaperture polishing technologies have radically changed the landscape of precision optics manufacturing and enabled the production of higher precision optics with increasingly difficult figure requirements. However, metrology is a critical piece of the optics fabrication process, and the dependence on interferometry is especially acute for computer-controlled, deterministic finishing. Without accurate full-aperture metrology, figure correction using subaperture polishing technologies would not be possible. QED Technologies has developed the Subaperture Stitching Interferometer (SSI) that extends the effective aperture and dynamic range of a phase measuring interferometer. The SSI's novel developments in software and hardware improve the capacity and accuracy of traditional interferometers, overcoming many of the limitations previously faced. The SSI performs high-accuracy automated measurements of spheres, flats, and mild aspheres up to 200 mm in diameter by stitching subaperture data. The system combines a six-axis precision workstation, a commercial Fizeau interferometer of 4" or 6" aperture, and dedicated software. QED's software automates the measurement design, data acquisition, and mathematical reconstruction of the full-aperture phase map. The stitching algorithm incorporates a general framework for compensating several types of errors introduced by the interferometer and stage mechanics. These include positioning errors, viewing system distortion, the system reference wave error, etc. The SSI has been proven to deliver the accurate and flexible metrology that is vital to precision optics fabrication. This paper will briefly review the capabilities of the SSI as a production-ready, metrology system that enables costeffective manufacturing of precision optical surfaces.

Citation Download Citation

Marc Tricard, Greg Forbes, and Paul Murphy "Subaperture metrology technologies extend capabilities in optics manufacturing", Proc. SPIE 5965, Optical Fabrication, Testing, and Metrology II, 59650B (25 October 2005); https://doi.org/10.1117/12.625808

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