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19 October 2005 Dos and don'ts in characterizing and cleaning optical surfaces
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Depending on the application, different characterization techniques are appropriate for bare and thin-film-coated optics. It is essential that substrates to be coated with thin films be dust free and do not contain surface films that interfere with the adhesion of the coatings. All surfaces must be inspected before making any measurements or before attempting to clean them. The cleaning technique used for a dirty surface will depend on its intended use and the type of contamination that is present. Some coated surfaces cannot be cleaned. Surfaces should also always be inspected after they are cleaned. Meaningful surface topography information can only be obtained on surfaces that have true surface structure from the fabrication and coating processes without additional contamination.
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Jean M. Bennett "Dos and don'ts in characterizing and cleaning optical surfaces", Proc. SPIE 5965, Optical Fabrication, Testing, and Metrology II, 596518 (19 October 2005);

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