Liquid immersion deep-UV optical disc mastering for high data capacity ROM discs

Jaap H. M. Neijzen; Erwin R. Meinders; Marius I. Boamfa; Dianyong Chen

doi:10.1117/12.649808

15 September 2005 Liquid immersion deep-UV optical disc mastering for high data capacity ROM discs

Jaap H. M. Neijzen, Erwin R. Meinders, Marius I. Boamfa, Dianyong Chen

Proceedings Volume 5966, Seventh International Symposium on Optical Storage (ISOS 2005); 59661V (2005) https://doi.org/10.1117/12.649808
Event: Seventh International Symposium on Optical Storage (ISOS 2005), 2005, Zhanjiang, China

Abstract

In this paper we describe the liquid immersion mastering technique and its application to the mastering of ROM discs for the Blu-ray Disc system and for ROM discs with considerably higher data densities. Replicated 25GB BD-ROM discs were evaluated using a standard blue test player (λ=405nm, NA=0.85). A bottom jitter value with limit equalizer of less than 5% was measured. Also the values of asymmetry, normalized push pull and symbol error rate were well within the Blu-ray Disc format specification, offering a large process window. Full-format BD-ROM test discs with high definition video content were mastered and their successful read-back was demonstrated. In addition we show that liquid immersion mastering can successfully be applied for mastering of considerably higher densities. Measurements on replicated discs up to data densities above 40GB per layer are discussed. The present results demonstrate that liquid immersion mastering is a proven technology for the mass-production of high data capacity ROM discs.

Citation Download Citation

Jaap H. M. Neijzen, Erwin R. Meinders, Marius I. Boamfa, and Dianyong Chen "Liquid immersion deep-UV optical disc mastering for high data capacity ROM discs", Proc. SPIE 5966, Seventh International Symposium on Optical Storage (ISOS 2005), 59661V (15 September 2005); https://doi.org/10.1117/12.649808

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