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12 October 2005 Multi-laser deposition technology for the nano-films of complex composition
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Abstract
A relatively cheap and compact deposition system, providing excellent high temperature superconducting films parameters, has been developed and studied. Y-Ba-Cu-O thin films were deposited routinely by the YAG double-laser system with the special optical beam and plasma plume shaping systems. Buffer CeO2 layers were deposited by the laser system as well. The properties of the plasma plume generated by the laser beam with a specific intensity distribution were investigated. A correlation between the superconducting film properties and the thermal schedule of the deposition process, the geometry of the set-up, the laser beam intensity distribution, the plasma plume shape and oxygen pressure has been found. Under optimal conditions Al2O3 - CeO2 - YBa2Cu3O7-δ - structures have provided the maximum critical current density of close to 107 A×cm-2 at 77 K in zero magnetic field. The films were used for the ultra high-frequency filters for the telecommunication devices.
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Igor Peshko, Viktor Flis, and Sergey Anokhov "Multi-laser deposition technology for the nano-films of complex composition", Proc. SPIE 5970, Photonic Applications in Devices and Communication Systems, 597010 (12 October 2005); https://doi.org/10.1117/12.628362
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