Laser ablated particles behaviour in PLD systems

A. Marcu; C. Grigoriu; K. Yatsui

doi:10.1117/12.639734

14 December 2005 Laser ablated particles behaviour in PLD systems

A. Marcu, C. Grigoriu, K. Yatsui

Proceedings Volume 5972, Advanced Topics in Optoelectronics, Microelectronics, and Nanotechnologies II; 59720P (2005) https://doi.org/10.1117/12.639734
Event: Advanced Topics in Optoelectronics, Microelectronics, and Nanotechnologies II, 2004, Bucharest, Romania

Abstract

A novel three-dimensional model has been proposed for simulating plume behavior and 'micron-sized particles' movement and interaction. It describes particles expansion in vacuum or into an environmental gas and particles interaction with various obstacles. The model simulates 'standard' Pulsed Laser Deposition (PLD) system behavior, but also some droplet reduction techniques used in PLD (e.g. shadow mask technique) having good results in plasma expansion for the first several centimeters from target. The carried out simulations have shown that in the PLD with plasma reflection (PLDPR) the influence of mass and particle's surface area on the droplets trajectory is significant. By increasing of the particle mass or by decreasing particle's surface, the probability of the particle to be driven into the deposition area by plume fine particles is considerably decreasing.

Citation Download Citation

A. Marcu, C. Grigoriu, and K. Yatsui "Laser ablated particles behaviour in PLD systems", Proc. SPIE 5972, Advanced Topics in Optoelectronics, Microelectronics, and Nanotechnologies II, 59720P (14 December 2005); https://doi.org/10.1117/12.639734

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