Characterization of chemical microsensors in SAW systems

Ovidiu Iancu; Constantin Grigoriu; Ionica Cristea; Monica Nadasan; Neculai Grosu

doi:10.1117/12.639742

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14 December 2005 Characterization of chemical microsensors in SAW systems

Ovidiu Iancu, Constantin Grigoriu, Ionica Cristea, Monica Nadasan, Neculai Grosu

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Proceedings Volume 5972, Advanced Topics in Optoelectronics, Microelectronics, and Nanotechnologies II; 59720W (2005) https://doi.org/10.1117/12.639742
Event: Advanced Topics in Optoelectronics, Microelectronics, and Nanotechnologies II, 2004, Bucharest, Romania

Abstract

Between other sensing and identification technologies that of Surface Acoustic Waves, (SAW), is a unique sensing system. The principal advantage to most SAW systems is that they can use two or three SAW sensors and compare the measurements between them, providing a good accuracy. We have carried out the design of both piezoelectric substrate and interdigital transducers, (IDTs), and has tested them in a delay line mode operation. The measurement of changes in the surface waves characteristics were materialized by applying of a radio frequency electric field to the piezoelectric crystal by means of IDTs. The finger width of the IDTs was measured by high accuracy optical coherent method. The results are presented in the work. The potential development of microsensors as an array of four or five miniature sensors, sensitive to Werent chemicals may be used as mobile chemical detecting units carried by remote control vehicles to the site chemical contamination.

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Ovidiu Iancu, Constantin Grigoriu, Ionica Cristea, Monica Nadasan, and Neculai Grosu "Characterization of chemical microsensors in SAW systems", Proc. SPIE 5972, Advanced Topics in Optoelectronics, Microelectronics, and Nanotechnologies II, 59720W (14 December 2005); https://doi.org/10.1117/12.639742

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