Interferogram analysis for flatness metrology

Victor Nascov; Adrian Timcu; Dan Apostol; Florin Garoi; Victor Damian; Iuliana Iordache; Petre Cătălin Logofătu

doi:10.1117/12.639776

14 December 2005 Interferogram analysis for flatness metrology

Victor Nascov, Adrian Timcu, Dan Apostol, Florin Garoi, Victor Damian, Iuliana Iordache, Petre Cătălin Logofătu

Proceedings Volume 5972, Advanced Topics in Optoelectronics, Microelectronics, and Nanotechnologies II; 59721C (2005) https://doi.org/10.1117/12.639776
Event: Advanced Topics in Optoelectronics, Microelectronics, and Nanotechnologies II, 2004, Bucharest, Romania

Abstract

Presented in this paper are numerical algorithms necessary to determine the surface error by means of optical interferometry. These algorithms are based on digital processing of phase-modulated fringe patterns, and are using the discrete Fourier transform method.

Citation Download Citation

Victor Nascov, Adrian Timcu, Dan Apostol, Florin Garoi, Victor Damian, Iuliana Iordache, and Petre Cătălin Logofătu "Interferogram analysis for flatness metrology", Proc. SPIE 5972, Advanced Topics in Optoelectronics, Microelectronics, and Nanotechnologies II, 59721C (14 December 2005); https://doi.org/10.1117/12.639776

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