Paper
7 December 2006 Dispersive properties of Co/C sliced multilayer gratings for the 4.4-5 nm wavelength interval
E. A. Bugaev, R. M. Feshchenko, A. V. Vinogradov, D. L. Voronov, V. A. Tokarev, V. P. Petukhov
Author Affiliations +
Proceedings Volume 5974, International Conference on Charged and Neutral Particles Channeling Phenomena; 59741F (2006) https://doi.org/10.1117/12.640286
Event: International Conference on Charged and Neutral Particles Channeling Phenomena, 2004, Rome, Italy
Abstract
Two samples of the new type of X-ray spectral elements - sliced multilayer grating (SMG) for 4.4-5 nm interval have been produced and tested. Spectra of A1 discharge plasma were obtained with one of the SMGs. A novel experimental approach based on a flow proportional counter was introduced and used to measure diffraction efficiency of another SMG. The properties of the SMG are discussed.
© (2006) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
E. A. Bugaev, R. M. Feshchenko, A. V. Vinogradov, D. L. Voronov, V. A. Tokarev, and V. P. Petukhov "Dispersive properties of Co/C sliced multilayer gratings for the 4.4-5 nm wavelength interval", Proc. SPIE 5974, International Conference on Charged and Neutral Particles Channeling Phenomena, 59741F (7 December 2006); https://doi.org/10.1117/12.640286
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Cited by 2 scholarly publications.
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KEYWORDS
Multilayers

Coating

Diffraction gratings

Plasma

Diffraction

Spectroscopy

Carbon

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