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8 November 2005 New MOEMS based systems appropriate for spectroscopic investigations on agricultural growth and perishable food conditions
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Further optimization of the agricultural growth process and quality control of perishable food which can be fruits and vegetables as well as every kind of meat or milk product requires new approaches for the sensitive front end. One possibility is reflectance or fluorescence spectroscopy in a wide wavelength range. By now broad usage is hindered by costs, size and performance of existing systems. MOEMS scanning gratings for spectrometers and translational mirrors for Fourier Transform spectroscopy enable small robust systems working in a range from 200nm to 5μm. Both types use digital signal processors (DSPs) capable to compute the spectra and execute complex evaluation and decision algorithms. The MOEMS chips are realized by anisotropic etching of a silicon on insulator (SOI) substrate. First the backside silicon and buried oxide is removed by a wet process then the front side structure is realized by dry etching. Depending on the bearing springs a silicon plate up to 3 x 3 mm2 wide and typically 30μm thick can be driven resonantly to rotational or translational movement. Combined with additional optical components and appropriate detectors handheld Czerny-Turner or Fourier Transform spectrometers have been realized and tested. Results of first measurements of reflection spectroscopy on model substances have been performed with both system types in the NIR range. Measurements on real objects like tomatoes or apples are intended for a wider wavelength range. Future systems may contain displays and light sources as well as data storage cards or additional interfaces.
© (2005) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Heinrich Grueger, Harald Schenk, Andreas Heberer, Fabian Zimmer, Werner Scherff, Andreas Kenda, and Albert Frank "New MOEMS based systems appropriate for spectroscopic investigations on agricultural growth and perishable food conditions", Proc. SPIE 5996, Optical Sensors and Sensing Systems for Natural Resources and Food Safety and Quality, 599610 (8 November 2005);


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