Kinoform lenses: toward nanometer resolution

Aaron Stein; Kenneth Evans-Lutterodt; Ashley Taylor

doi:10.1117/12.631188

15 November 2005 Kinoform lenses: toward nanometer resolution

Aaron Stein, Kenneth Evans-Lutterodt, Ashley Taylor

Proceedings Volume 6002, Nanofabrication: Technologies, Devices, and Applications II; 600210 (2005) https://doi.org/10.1117/12.631188
Event: Optics East 2005, 2005, Boston, MA, United States

Abstract

While hard x-rays have wavelengths in the nanometer and sub-nanometer range, the ability to focus them is limited by the quality of sources and optics, and not by the wavelength. A few options, including reflective (mirrors), diffractive (zone plates) and refractive (CRL's) are available, each with their own limitations. Here we present our work with kinoform lenses which are refractive lenses with all material causing redundant 2π phase shifts removed to reduce the absorption problems inherently limiting the resolution of refractive lenses. By stacking kinoform lenses together, the effective numerical aperture, and thus the focusing resolution, can be increased. The present status of kinoform lens fabrication and testing at Brookhaven is presented as well as future plans toward achieving nanometer resolution.

Citation Download Citation

Aaron Stein, Kenneth Evans-Lutterodt, and Ashley Taylor "Kinoform lenses: toward nanometer resolution", Proc. SPIE 6002, Nanofabrication: Technologies, Devices, and Applications II, 600210 (15 November 2005); https://doi.org/10.1117/12.631188

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