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5 December 2005 Ultra-thin metallic foil thickness measurement system using fiber optic low-coherence interferometry
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Proceedings Volume 6019, Passive Components and Fiber-based Devices II; 60194H (2005) https://doi.org/10.1117/12.635509
Event: Asia-Pacific Optical Communications, 2005, Shanghai, China
Abstract
The thickness of metallic foil is measured by differential low-coherence interferometry. Two tandem Michelson Interferometers (MI), of which reflective surfaces measured are the corresponding surfaces of metallic foil, are used as basic interferometric system to obtain interference fringes on a spectrometer. Therefore, the interference fringes only depend on the path differences due to the thickness of metallic foil. The interference fringes are analyzed with a modified extremum method based on the least root mean square (RMS) deviation. The experimental results on thickness measurement are presented.
© (2005) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Yanli Du, Huimin Yan, Yongjun Nie, and Xiuda Zhang "Ultra-thin metallic foil thickness measurement system using fiber optic low-coherence interferometry", Proc. SPIE 6019, Passive Components and Fiber-based Devices II, 60194H (5 December 2005); https://doi.org/10.1117/12.635509
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