Displacement measurement with a dual-colored sinusoidal phase-modulating interferometer

Takamasa Suzuki; Toshihiko Sato; Osami Sasaki

doi:10.1117/12.666819

9 December 2005 Displacement measurement with a dual-colored sinusoidal phase-modulating interferometer

Takamasa Suzuki, Toshihiko Sato, Osami Sasaki

Proceedings Volume 6024, ICO20: Optical Devices and Instruments; 60240F (2005) https://doi.org/10.1117/12.666819
Event: ICO20:Optical Devices and Instruments, 2005, Changchun, China

Abstract

Interferometric displacement sensor based on a two-wavelength interferometry is proposed and demonstrated. A combination of time-shared two-wavelength laser diode and sinusoidal phase-modulating interferometry enables us to realize accurate and wide-range displacement measurement with a simple optical setup.

Citation Download Citation

Takamasa Suzuki, Toshihiko Sato, and Osami Sasaki "Displacement measurement with a dual-colored sinusoidal phase-modulating interferometer", Proc. SPIE 6024, ICO20: Optical Devices and Instruments, 60240F (9 December 2005); https://doi.org/10.1117/12.666819

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