Study on distortion control technology of the active stressed lap polishing deeper aspherical mirror

Ying Li; Daxing Wang

doi:10.1117/12.666938

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9 December 2005 Study on distortion control technology of the active stressed lap polishing deeper aspherical mirror

Ying Li, Daxing Wang

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Proceedings Volume 6024, ICO20: Optical Devices and Instruments; 60241V (2005) https://doi.org/10.1117/12.666938
Event: ICO20:Optical Devices and Instruments, 2005, Changchun, China

Abstract

A special computer controlled polishing machine and a 450mm diameter active stressed lap have been developed in NIAOT, and the lap has been successfully applied on polishing a f/2, Φ910mm paraboloidal mirror. This paper briefly introduces the control structure of the polishing system. The deformation technology is an important part of the stressed lap. This paper puts emphases upon discussing the deformation technology. On the base of experiments on f/2 mirror, deformation experiments on f/1.5, f/1.2 have been done also. As the asphericity becomes faster, the dynamic response of the lap's deformation becomes slower and the error of shape becomes bigger. In order to solve this problem and improve deformation precision, we analyse the reason for the error of the lap and discuss the dedormation emendating problem. In the end according to the result of deforming experiments, several considerations for optimization of mechanic-electric design of the stressed lap are given.

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Ying Li and Daxing Wang "Study on distortion control technology of the active stressed lap polishing deeper aspherical mirror", Proc. SPIE 6024, ICO20: Optical Devices and Instruments, 60241V (9 December 2005); https://doi.org/10.1117/12.666938

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