Fabrication of vertical coupled polymer microring resonator

Wenyuang Deng; Shulin E; Degui Sun; Pengfei Wang; Daming Zhang; Wu Xu

doi:10.1117/12.667062

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28 January 2006 Fabrication of vertical coupled polymer microring resonator

Wenyuang Deng, Shulin E, Degui Sun, Pengfei Wang, Daming Zhang, Wu Xu

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Proceedings Volume 6025, ICO20: Optical Communication; 60251F (2006) https://doi.org/10.1117/12.667062
Event: ICO20:Optical Devices and Instruments, 2005, Changchun, China

Abstract

In this paper, a new fabricating strategy for polymer microring resonators vertically coupled to a bus waveguide is developed. A carefully engineered Al masking process is utilized to compensate the local concave of the buried waveguide formed by polymer spin-coating, realizing perfectly flat top surface of the buried bus waveguide. A serial of the vertically coupled polymer microring resonator showing excellent topology was fabricated with this strategy. The resonance phenomenon is oberved in a PMMA-based microring resonators using this fabricating strategy .The suggested approach is suitable to fabricate vertically coupled polymer micro-resonators.

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Wenyuang Deng, Shulin E, Degui Sun, Pengfei Wang, Daming Zhang, and Wu Xu "Fabrication of vertical coupled polymer microring resonator", Proc. SPIE 6025, ICO20: Optical Communication, 60251F (28 January 2006); https://doi.org/10.1117/12.667062

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