Study on the fabrication of orange micro-LED arrays for display

Xia Jin; Jingqiu Liang; Jia Li; Lina Zhao; Weibiao Wang

doi:10.1117/12.667643

26 January 2006 Study on the fabrication of orange micro-LED arrays for display

Xia Jin, Jingqiu Liang, Jia Li, Lina Zhao, Weibiao Wang

Proceedings Volume 6030, ICO20: Display Devices and Systems; 60300U (2006) https://doi.org/10.1117/12.667643
Event: ICO20:Optical Devices and Instruments, 2005, Changchun, China

Abstract

Arrays of micro-sized LEDs which can be used as microdisplays have been demonstrated in recent years. In order to reduce the input and output connections to the arrays, we employ a matrix addressable architecture, in which all the pixels in each row are connected by a common metal line on the top of the window layer (top electrode) or at the base of substrate(bottom electrode). Decreasing the size of electrodes makes for minimizing the size of device. The optic and electronic isolation and good ohmic contact are also helpful to obtain superior optical and electrical performance. We describe a procedure of fabrication of AlGaInP-based orange micro-LED by wet etching. The structure of devices is etched using both isotropic and anisotropic solvent. The pixel size is about 16um x 20um, and there are 1000 x 818 pixels in the light emitting chip whose diagonal is 1-in.

Citation Download Citation

Xia Jin, Jingqiu Liang, Jia Li, Lina Zhao, and Weibiao Wang "Study on the fabrication of orange micro-LED arrays for display", Proc. SPIE 6030, ICO20: Display Devices and Systems, 60300U (26 January 2006); https://doi.org/10.1117/12.667643

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