Theory and simulation of MEMS deformable mirror

Jinliang Yan; Yinnv Zhao; Fen Yu; Youliang Zhu; Hongzhao Zhang

doi:10.1117/12.667868

7 February 2006 Theory and simulation of MEMS deformable mirror

Jinliang Yan, Yinnv Zhao, Fen Yu, Youliang Zhu, Hongzhao Zhang

Proceedings Volume 6032, ICO20: MEMS, MOEMS, and NEMS; 60320J (2006) https://doi.org/10.1117/12.667868
Event: ICO20:Optical Devices and Instruments, 2005, Changchun, China

Abstract

A novel MEMS deformable mirror was proposed and characterized. Actuator deflection was simulated using one dimensional electromechanical model. The diaphragm was modeled as a double cantilever beam, with a gap-dependent electrostatic actuating force. The effect of the structural parameters and actuated voltages on the deflection of the actuator was closely studied. A lumped parameter model for predicting the reset transient motion of the actuator, taking into account tensile forces and viscous air damping via squeeze film theory, was used to determine the reset time. The results show that the elastic diaphragm thickness, the elastic diaphragm length and gap spacing have a strong effect on the deflection, the actuator displays typical nonlinear deflection versus voltage characteristics and electromechanical instability at elevated voltages. The reset transient motion of the actuator is an exponential decay oscillation line, the reset time is about 0.14μs.

Citation Download Citation

Jinliang Yan, Yinnv Zhao, Fen Yu, Youliang Zhu, and Hongzhao Zhang "Theory and simulation of MEMS deformable mirror", Proc. SPIE 6032, ICO20: MEMS, MOEMS, and NEMS, 60320J (7 February 2006); https://doi.org/10.1117/12.667868

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