The deflection and frequency analysis of micro silicon cantilever beam actuated by electrostatic force

Guoqing Hu; Guangwen Chen; Wenyan Liu

doi:10.1117/12.667875

7 February 2006 The deflection and frequency analysis of micro silicon cantilever beam actuated by electrostatic force

Guoqing Hu, Guangwen Chen, Wenyan Liu

Proceedings Volume 6032, ICO20: MEMS, MOEMS, and NEMS; 60320P (2006) https://doi.org/10.1117/12.667875
Event: ICO20:Optical Devices and Instruments, 2005, Changchun, China

Abstract

The deflection analysis of a micro silicon cantilever beam actuated by electrostatic force is presented in this paper, from analysis, it has been shown that the force applied on the cantilever varies according to the deflection of cantilever, so, it is difficult to solve the differential equation of the deflection, especially, and the load is changing. A new increment method to solve this problem is presented, the cantilever is divided into a number of small segments, it is assumption that every segment has a constant concentrated force, and the electrostatic force is loaded on step by step, when the segment and load step is small enough, the simulation result will be limited to accuracy. In the same time, the frequency of the cantilever is also obtained.

Citation Download Citation

Guoqing Hu, Guangwen Chen, and Wenyan Liu "The deflection and frequency analysis of micro silicon cantilever beam actuated by electrostatic force", Proc. SPIE 6032, ICO20: MEMS, MOEMS, and NEMS, 60320P (7 February 2006); https://doi.org/10.1117/12.667875

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