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7 February 2006 The study on the epoxy resin compound x-ray refractive lens
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Proceedings Volume 6032, ICO20: MEMS, MOEMS, and NEMS; 60320U (2006)
Event: ICO20:Optical Devices and Instruments, 2005, Changchun, China
In this paper, the authors report their resent results of the study on the epoxy resin compound X-ray refractive lens. At the first, the theoretical results of the structure parameters for such a device are given. Then, the fabrication technologies are presented. They are deep soft X-ray lithography, mold-manufacturing and molding. The material of X-ray photoresist is PMMA, the mold is made of silicone rubber, and the material of the lens is epoxy resin. Some measured results by means of optical microscope and SEM are also shown. The structure height of the epoxy resin compound lens is measured to be 500 micrometers.
© (2006) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Jingqiu Liang, Zichun Le, Liangqiang Peng, Weibiao Wang, Futing Yi, Bisheng Quan, Jingsong Yao, Jun Zhang, Wen Dong, and Ming Xuan "The study on the epoxy resin compound x-ray refractive lens", Proc. SPIE 6032, ICO20: MEMS, MOEMS, and NEMS, 60320U (7 February 2006);

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