Usage of a speckle correlation for object surface topography

Pavel Horváth; Petr Šmíd; Petra Wagnerova; Miroslav Hrabovský

doi:10.1117/12.668177

1 February 2006 Usage of a speckle correlation for object surface topography

Pavel Horváth, Petr Šmíd, Petra Wagnerova, Miroslav Hrabovský

Proceedings Volume 6034, ICO20: Optical Design and Fabrication; 603421 (2006) https://doi.org/10.1117/12.668177
Event: ICO20:Optical Devices and Instruments, 2005, Changchun, China

Abstract

The paper demonstrates possibility of application of the method called speckle pattern correlation for topography of the object surface under investigation. Scanning speckle pattern originating from different points of the object surface illuminated with laser beam enables to get information on height profile of the object surface in these points. This is presented on the measurement of the slope of the object surface. The principle of the presented method is shortly described including necessary equations. A possible optical set-up for the measurement of the slope of the object under investigation is designed and acquired results are presented in comparison with theoretic values.

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Pavel Horváth, Petr Šmíd, Petra Wagnerova, and Miroslav Hrabovský "Usage of a speckle correlation for object surface topography", Proc. SPIE 6034, ICO20: Optical Design and Fabrication, 603421 (1 February 2006); https://doi.org/10.1117/12.668177

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